7/8 Summer Colloquium Speaker Announcement


head_stephenOn Tuesday, July 8st the UR SPIE student chapter will be continuing its Summer Colloquium series. Please bring your lunch and come listen to our next presentation! Snacks and beverages will be provided.

Who: Steve Head
What: Arbitrary Spatially-Varying Polarization State Generator for Deep Sub-Wavelength Metrology​
Date: 7/8/2014
Time: 11:30 am – 12:30 pm
Where: Sloan Auditorium (Goergen 101)
Abstract: The lithography industry makes use of a wide array of tools for metrology of their nano-scale structures.  Scatterometry is one such method in which the scattered light from a periodic test structure is compared with theoretical results from Rigorous Coupled Wave Analysis in order to back-out structure parameters such as critical dimension, film thicknesses, and sidewall angle.  Current scatterometry methods could possibly be improved by using a focused beam to acquire angular scatter information in a single measurement and by tailoring the input polarization to make the output more sensitive to small deviations.  This talk will focus on the polarization generator I helped build and how it can be used to maximize the ability of a scatterometry system to back-out structure parameters.

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